Bio-Micromanipulation Using Micro Tri-axial Force Sensor
The center of the mass of the chip is suspended by four cantilevers, and
each cantilever has piezoresistive strain gages.
Micro tri-axial force sensor is installed near the tool tip and used for
real-time force feedback control of a micromanipulator.
The force sensing principle is based on the piezoresistivity effect and
it has good linearity.
