MHSf98 Advanced Program

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Wednesday, November 25, 1998

Nagoya Congress Center

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Conference Room 1 (Room 234)

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10:30-11:00 Opening Ceremony

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Keynote Lecture

Conference Room 1 (Room 234)

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11:00-11:50 Micro Sensors and Systems for Industrial Use

-Requirements and Specifications-

Prof. Dietrich Hofmann

CiS Institute for Microsensorics, Germany

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Plenary Lectures

Conference Room 1 (Room 234)

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13:10-14:00 Applications of MEMS Technology in Automotive Sensors and Actuators

Dr. Shih-Chia Chang

General Motors Research and Development Center, U.S.A.

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14:00-14:50 Micromachine Technology Development and Its Applications

Dr. Shigeyuki Akita

Research Laboratories, DENSO CORPORATION, Japan@

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15:20-16:10 Safety Relevant Microsystems for Automotive Applications

Dr. Helmut Seidel

Operating Division of Daimler-Benz for

Microsensors, Temic, Product Unit Sensor Systems, Germany

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16:10-17:00 Microsensors and Microactuators Using Ferroelectric Thin Films

Prof. Masanori Okuyama

Osaka University, Japan

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Thursday, November 26, 1998

Nagoya Congress Center

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Invited Lecture

Conference Room 1 (Room 234)

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9:10-10:00 Multi-user Integration Chip Service (MICS) Project for MEMS

Prof. Susumu Sugiyama

Ritsumeikan University, Japan@

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Technical Sessions

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Session A-1: Microfabrication

Conference Room1 (Room 234))

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10:20-10:45 Ultra-fine Piercing by SiC Fiber Punch

T. Mori, K. Nakashima, D. Tokumoto

Nagoya University, Japan

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10:45-11:10 Micromachining Applications of Selective Anodization

M. Murate and H. Iwata

TOKAI RIKA CO. LTD., Japan

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11:10-11:35 Anisotropic Etching Properties of Silicon in KOH and TMAH Solutions

K. Tokoro, D. Uchikawa, M. Shikida and K. Sato

Nagoya University, Japan

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11:35-12:00 A Study of Diffusion in Layered Thin Film

T. Yamamoto, H. Kotera, T. Hirasawa and S. Shima

Kyoto University, Japan

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Session A-2: Microcomponents and Microdevices I

Conference Room2 (Room 233)

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10:20-10:45 A Numerical Simulation on the Flowfield

of the Novel Pneumatic Actuator System Realized by Micro-EDM

T. Hirata and T. Akashi

Sumitomo Heavy Industries, Ltd., Japan,

M.-A. Grillat, O.T. Guenat and N. F. de Rooij

University of Nouchatel, Switzerland

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10:45-11:10 An XYĮ Actuator with a Closed-loop Magnetic Field

H. Kato, A. Torii and A. Ueda

Aichi Institute of Technology, Japan

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11:10-11:35 Stick and Slip Actuators: Design, Control, Performances and Applications

J.-M. Breauet and R. Clavel

Ecole Polytechnique Fedale de Lausanne (EPFL), Switzerland

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11:35-12:00 Control and Analysis of Low Intertia Miniature Synchronous Motors

J. D. Nicoud, O. Matthey and G. Caprari

Ecole Polytechnique Fedale de Lausanne (EPFL), Switzerland

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Session B-1: 3D Microfabrication

Conference Room1 (Room 234)

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13:05-13:30 Laser Microstructuring of Composite Powder Materials

Y P Kathuria

Laser X Co. Ltd., Japan

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13:30-13:55 Laser Microprocessing of Stent for Medical Therapy

Y P Kathuria

Laser X Co. Ltd., Japan

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13:55-14:20 New Microstereolithography (Super-IH Process) to Create 3D Freely

Movable Micromechanism without Sacrificial Layer Technique

S. Maruo and K. Ikuta

Nagoya University, Japan

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14:20-14:45 Consideration on Alignment of Whisker in Unidirectional Whisker

Reinforced Micro Part Produced by UV Laser Photopolymerization

T. Nakamoto, K. Yamaguchi and T. Tsuchiya

Nagoya University, Japan

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Session B-2: Micro/nano-manipulation and Control I

Conference Room2 (Room 233)

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13:05-13:30 3D Micromanipulation System under Microscope

F. Arai, A. Kawaji, T. Sugiyama, Y. Onomura, M. Ogawa and T. Fukuda

Nagoya University, Japan

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13:30-13:55 Control Issues in Micromanipulation

P. Kallio and Q. Zhou

Tampere University of Technology, Finland

H. Koivo

Helsinki University of Technology, Finland

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13:55-14:20 2-D Micro Particle Assembly Using Atomic Force Microscope

M. Sitti, K. Hirahara and H. Hashimoto

University of Tokyo, Japan

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Session C-1: Microcomponents and Microdevices II

Conference Room1 (Room 234)

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15:05-15:30 Study on Fabrication of High Aspect Ratio Electrostatic Micro Actuators

Using LIGA Process

R. Kondo, K. Suzuki and S. Sugiyama

Ritsumeikan University, Japan

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15:30-15:55 Study of Large Bending and Low Voltage Drive Electrostatic Actuator

with Novel Shaped Cantilever and Electrode

Y. Hirai, M. Shindo and Y. Tanaka

Osaka Prefecture University, Japan

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15:55-16:20 A New Micro SMA Thin Film Actuator Prestrained by Polyimide

K. Kuribayashi and T. Fujii

Yamaguchi University, Japan

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16:20-16:45 A Control System to Compensate the Hysteresis by Preisach Model

on SMA Actuator

T. Hasegawa

Nagoya University, Japan

S. Majima

Tsukuba University, Japan

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16:45-17:10 Tunable Acoustic Absorber with Micro Deep Hole Array

M. Yoda, S. Sugiyama, S. Akishita and S. Konishi

Ritsumeikan University, Japan

17:10-17:35 Crystal Anisotropy of Elastoresistance Effect of Semiconductive Piezoresistor

and Its Application to Transducers

T. Toriyama and S. Sugiyama

Ritsumeikan University, Japan

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Session C-2:Micro/nano-manipulation and Control II

Conference Room2 (Room 233)

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15:05-15:30 Feasibility Study of Magnetically Levitated Micro Hand for Machining and Assembly

T. Nakamura, Y. Mori, Y. Kogure and H. Akamatsu

Tokyo Metropolitan University, Japan

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15:30-15:55 Experimental Investigation of a Distributed Conveyance System Using Air Flow

S. Konishi, Y. Mizoguchi, M. Harada, K. Ohno

Ritsumeikan University, Japan

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15:55-16:20 Two-Dimensional Acoustic Micromanipulation Using Three Ultrasonic Transducers

T. Kozuka, T. Tuziuti and H. Mitome

National Industrial Research Institute of Nagoya, Japan

T. Fukuda and F. Arai

Nagoya University, Japan

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16:20-16:45 Manipulation of Single DNA Molecules on Globular State: Recovery into Capillary

and Direct Laser Trapping

K. Hirano, A. Yamaguchi, Y. Maeda, Y. Matsuzawa, S. Katsura and A. Mizuno

Toyohashi@University of Technology, Japan@

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16:45-17:10 Reentrant Conformational Transitions in DNA Molecules Complexed with Cationic Surfactant

S. V. Mikhailenko (1, 2), V. G. Sergeyev (2), and K. Yoshikawa (3)

(1) Nagoya University, Japan, (2) Moscow State University, Russia, (3) Kyoto University, Japan

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17:10-17:35 Physical Limits and Information Bounds of Micro Control

Part2: Quantum Computing and Quantum Searching Algorithms

S. V. Ulyanov (1,4), G. D. Antoni (3), K. Yamafuji (1), T. Fukuda (2),

      1. G. G. Rizzotto (3) and I. Kurawaki (4)
      2. 1. University of Electro-Communications, 2. Nagoya University, Japan,

3. SGS|THOMSON Microelectronics, 4. YAMAHA MOTOR CO., LTD., Japan

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17:35-18:15 Explanation of Exhibit (Conference Room 1)

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18:15-19:05 Reception Party

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Friday, November 27, 1998

Nagoya Congress Center

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Invited Lecture

Conference Room 1 (Room 234)

9:10-10:00 Micro Moving Robotics

Prof. Iwao Hayashi

Tokyo Institute of Technology, Japan

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Technical Sessions

Session D-1: Microcomponents and Microdevices III

Conference Room1 (Room 234)

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10:20-10:45 Transient Vibration Measurement of an Ultrasonic Motor Using Stroboscopic Phase-shift Interferometry

Y. Nishikura, A. Torii and A. Ueda

Aichi Institute of Technology, Japan

K. Hane

Tohoku University, Japan

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10:45-11:10 The Autonomous Micro Robot "Alice": A Platform for Scientific and Commercial Applications

G. Caprari, P. Balmer, R. Piguet and R. Siegwart

Swiss Federal Institute of Technology in Lausanne (EPFL), Switzerland

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11:10-11:35 Microwave Energy Supply for In-pipe Micromachine

T. Shibata, T. Sasaya and N. Kawahara

DENSO CORPORATION, Japan

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11:35-12:00 Micro Robot in Small Pipe with Electromagnetic Actuator

L. Sun, P. Sun, X. Qin and C. Wang

Shanghai University, P. R. China

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Session D-2: Microfluidic System

Conference Room 2 (Room 233)

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10:20-10:45 Chemical IC Chip for Dynamical Control of Protein Synthesis

K. Ikuta S. Maruo, T. Fujisawa and Y. Fukaya

Nagoya University, Japan

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10:45-11:10 A New Type of Capsule Micropump Using ICPF Actuator

S. Guo, S. Hata and K. Sugumoto

Kagawa University, Japan

T. Fukuda

Nagoya University, Japan

K. Oguro

Osaka National Institute (AIST), Japan

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11:10-11:35 Theoretical Analysis and Experimental Testing of a Miniature Piezoelectric Pump.

D. Accoto, O. T. Nedelcu, M. C. Carrozza, P. Dario

Scuola Superiore Sant'Anna, Italy

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11:35-12:00 A PZT-driven Micropump

Z. Zhou, X. Wang, X. Ye, Y. Li and W. Zhang

Tsinghua University, P. R. China

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Saturday, November 28, 1998

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International Micro Robot Maze Contest

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Nagoya Congress Center

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13:00-15:00 Preliminaries

Category 0: Teleoperated Micro Racer

Category 1: Teleoperated Mountain Climbing Micro Robots

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15:30-16:30 Finals

Category 0: Teleoperated Micro Racer

Category 1: Teleoperated Mountain Climbing Micro Robots

Category 2: Wireless Autonomous Mobile Robots