MHS'94

Sunday, October, 1994

International Micro Robot Maze Contest

Monday, October3, 1994

10:00-10:30 Opening Ceremony at Hall
10:30-11:00 Keynote Lecture at Hall


Future Prospects of Micromachine Projects

Mr. Atsuo Hirai, Industrial Machinery Div., MITI


11:00-12:00 Plenary Lecture at Hall


Polysilicon Integrated Mechatronics: Applications and Recent Developments

Prof. Roger. T. Howe, University of California, U.S.A.


13:00-13:40 Plenary Lecture at Hall


New Results on Microsystem Technology at the Nuclear Research Center in Karlsruhe (KFK)

Prof. Wolfgang Menz, Kernforschungszentrum Karlsruhe GmbH, Germany


13:40-14:20 Plenary Lecture at Hall


Artificial Structured Materials and Micromachines

Prof. Iwao Fujimasa, University of Tokyo, Japan


14:20-15:00 Plenary Lecture at Hall


Design, Fabrication, and Application of Integrated Magnetic Microactuators

Prof. Mark G. Allen, Georgia Institute Technology, U.S.A.


15:20-16:00 Plenary Lecture at Hall


Social and Technical Impacts of Micromachines

Prof. Hiroyuki Fujita, University of Tokyo, Japan


16:00-16:40 Plenary Lecture at Hall


Rechargeable Lithium Microbatteries

Dr. John. B. Bates, Oak Ridge National Laboratory, U.S.A.


16:40-17:20 Plenary Lecture at Hall


Some Selected Research Item of the Micro Mechanics Department at MESA

Prof. Miko Elwenspoek, University of Twente, The Nether Land

Tuesday, October 4, 1994

Technical Session

9:20-12:00 : Session A-1: Microrobots

Chairpersons:


Prof. F. Arai, Nagoya University, Japan
Prof. H.G. Allen, Georgia Institute Technology, U.S.A.

Manipulation with Micro-tools (Invited Paper)


I. Shimoyama, H. Miura, R. Holzer, K. Chotoku, T. Inoue and K. Iwatani, The University of Tokyo, Japan


The Development of an In-pipe Microrobot Applying the Motion of an Earthworm


M. Takahashi, I. Hayashi, N. Iwatsuki and N. Ohki, Tokyo Institute of Technology, Japan
K. Suzumori, Toshiba Corp., Japan


Development of In-Pipe Operation Micro Robots


S. Iwashina, I. Hayashi, N. Iwatsuki and K.Nakamura, Tokyo Institute of Technology, Japan


A Prototype Model of Micro Mobile Machine with Piezoelectric Driving Force Actuator


T. Matsuoka, H. Okamoto, M. Asano, S. Mitsuishi and T. Matsui, MEITEC Corporation, Japan


Multi-Layered Inference with Possibility Distribution for Multiple Micro-Machines Control


T. Yagyu, H. Tanase, T. Moriyama and T. Matsui, MEITEC Corporation, Japan

13:00-15:00 : Session A-2 : Microdevices

Chairpersons:


Mr. T. Matsui, MEITEC Corporation, Japan
Prof. R. T. Howe, University of California, U.S.A.

Flexible Micro Magnetic Sensor Array for Nondestructive Evaluation (Invited Paper)


M. Uesaka, K. Hakuta,J. Pavo and K. Miya, The University of Tokyo, Japan
K.Aoki, Nuclear Fuel Industries, Ltd., Japan
A. Takahashi, Sumitomo PrecisionProducts Co., Ltd., Japan


LED Array Unit with Silicon Microreflector


K. Takahashi, N. Tadokoro and S. Takeuti, Saitama University, Japan


Development of High-Voltage Photovoltaic Micro-Devices for an Energy Supply to Micromachines


T. Sakakibara, H. Izu, T. Kura, W. Shinohara, H. Iwata, S. Kiyama and S. Tsuda, SANYO Electric Co., Ltd., Japan


Comparison of Electrostatic and Electromagnetic Motors Based on Fabrication and Performance Criteria.


K. Matsuzaki, T. Matsuo and Y. Mikuriya, Yaskawa Electric Corp., Japan


Acoustic Manipulation of Micro Objects Using an Ultrasonic Standing Wave


T. Kozuka, T. Tuziuti and H. Mitome, Agency of Industrial Science and Technology, MITI, Japan
T. Fukuda, Nagoya University, Japan

15:20-17:40 : Session A-3 : Microsystems

Chairpersons:


Mr. T. Idogaki, Nippondenso Co., Ltd., Japan
Dr. J. B. Bates, Oak Ridge National Laboratory, U.S.A.

Micro Flow Devices (Invited Paper)


S. Shoji, Waseda University, Japan
M. Esashi, Tohoku University, Japan


Continuous System Modeling of Shape Memory Alloy (SMA) for Control Analysis


K. Arai, S. Aramaki and K. Yanagisawa, OLYMPUS Optical CO., LTD., Japan


The Multi Agent System for the Autonomous Micro Robots -The Immune Mechanism for the Adaptation in the Dynamic Environments-


N. Mitsumoto, Nippondenso Co., Ltd., Japan
T. Fukuda and F. Arai, Nagoya University, Japan


Distributed and Cooperative System of Micro Robots withCommand Delivery


M. Noda, H. Itani, M. Natsume, H. Itoh and H. Hattori, Nagoya Municipal Industrial Research Institute,Japan
H. Tanase, H. Okamoto, M. Uchida, T. Nohara, K. Hasegawa, H. Yanagawa, T. Yagyu, T. Moriyama, S. Mitsuishi, M. Asano, T. Matsuoka and T. Matsui, MEITEC CORPORATION, Japan
M. Ando, T. Yamada and Y. Naruse, AISIN COSMOS R&D CO.,LTD., Japan


Theoretical Analysis and Design of Ultrasonic Micromotors


Cui T., Wang L., Lu Q. and Tong X., Chinese Academy of Sciences, China


Monolithic Micromanipulator with Flexure Hinges


Wu Y., Tong X. and Wang L., Chinese Academy of Sciences, China

10:00-12:00 : Session B-1 : Microactuators

Chairpersons:


Prof. K. Ikuta, Nagoya University, Japan
Prof. M. Elwenspoek, University of Twente, The Nether Land

Novel X-ray Sensitive Resists for the LIGA Technique (Invited Paper)

L. Hebling, P. Hoessel, G. Hoffmann and T. Wuensch*BASF AG
E. Koch, BASF Japan Ltd.
J. Hormers, O. Wollersheim, H. Zumaqu and J. Langen, Inst. f. Physik
H. Reinecke, Microparts Inc.

Excimer Laser Process Technology for Micro-Machining

Y. P. Kathuria and A. Tsuboi, Laser X Co., Ltd., Japan

Measurement of the Contact Impedance of Polymers Using a Multilayered Piezo Vibroimpactor

A. Daugela, H. Fujii and H. Uematsu, Gifu University, Japan
G. Kulvietis, Vilnius Technical University, Japan

Development of Ceramic Nano-porous Materials

J. Tsubaki, Nagoya University, Japan

Consideration on the Accuracy of Fabricating Microstructures Using UV Laser Induced Polymerization

K. Yamaguchi and T. Nakamoto, Nagoya University, Japan
P. Abraha A., Miyama Industry Co.,Ltd., Japan

13:00-15:00 : Session B-2 : Microfabrication and Materials

- Toward Nanoworld 3D Micromanipulation - (Organized Session)

Chairpersons:


Prof. Fumihito Arai, Nagoya University

Integrated Micro Endeffector for Dexterous Micromanipulation

F. Arai and T. Fukuda, Nagoya University, Japan
H. Iwata and K. Itoigawa, Tokai Rika Co., LTD., Japan

Dynamic Focusing Lens for Expanding Depth of Focus of Optical Microscope

T. Kaneko, A. Yamamoto, T. Idogaki and T. Hattori, Nippondenso Co., Ltd., Japan

Acoustic Micromanipulation Using a Multi-Electrode Transducer

T. Kozuka, T. Tuziuti and H. Mitome, MITI, Japan
T. Fukuda, Nagoya University, Japan

Transportation of DNA Molecule by Dielectrophoretic Force Utilizing the Conformational Transition in the Higher Order Structure of DNA

K. Morishima, T. Fukuda, F. Arai, H. Matsuura and K. Yoshikawa, Nagoya University, Japan

Application of Local Temperature Control for DNA Micromanipulation

K. Hirano, R. Ishii, H. Imayou, M. Nishioka, Y. Matsuzawa, S. Katsura and A. Mizuno, Toyohashi University of Technology, Japan

15:20-17:20 : Session B-3 : Applications

Chairpersons:


Prof. K. Sato, Nagoya University, Japan
Prof. J. Tsubaki, Nagoya University, Japan

Current Situation of Intravascular Neurosurgery and Its Future (Invited Paper)

M. Negoro, I. Takahashi, K. Nakabayashi, K. Fukui, and K. Sugita, Nagoya University, Japan

Miniaturized Chemical Analysis Systems

A. van den Berg, P. Bergveld, D. N. Reinhoudt, M. Elwenspoek and J. H. J. Fluitman, University of Twente, The Nether Land

Friction Force Reduction of Conduit Guided Wire by Vibration

K. Kuribayashi, S. Shimizu, K. Yuasa, T. Taniguchi and Y. Ikeda, Yamaguchi University, Japan

Micro Catheter System with Active Guide Wire - Structure, Experimental Results and Characteristic Evaluation of Active Guide Wire Catheter Using ICPF Actuator -

S. Guo, T. Fukuda, K. Kosuge, F. Arai and M. Negoro, Nagoya University, Japan
K.Oguro, Government Industrial Research Institute, Osaka, Japan

Phase Transformation Type Micro Pump

H. Takagi, R. Maeda and K. Ozaki, Agency of Industrial Science and Technology, MITI, japan
M. Parameswaran and M. Mehta, Simon Fraser University

If you want to get a proceedings of MHS'94, please contact to H. Ishihara, Assistant Professor, Nagoya University.