Touch sensor for micromanipulation using lead-free piezoelectric ceramics




  • K. Motoo, F. Arai, T. Fukuda, M. Matsubara, K. Kikuta, T. Yamaguchi, and S. Hirano, Touch sensor for micromanipulation with pipette using lead-free (K, Na)(Nb, Ta)O3 piezoelectric ceramics, J. Appl. Phys., Vol. 98, 094505, 2005.
  • K. Motoo, F. Arai, T. Fukuda, T. Katsuragi, and K. Itoigawa, High sensitive touch sensor with piezoelectric thin film for pipetting works under microscope, Sensors and Actuators A 126, pp. 1?6, 2006.